Electropulsing-Induced Microstructural Changes and Their Effects on Electrical Conductivity of Thin Films of an Al-doped ZnO

doi:10.1007/s40195-018-0809-2

Abstract

Abstract:

Electropulsing-induced phase decompositions and microstructural changes in AZO-5 thin films were studied by X-ray diffraction, scanning electron microscopy, atomic force microscopy, Hall effect measurement and photoluminescence (PL) measurement techniques. It was found that the electropulsing induced phase decomposition started with spinodal decomposition, which was accompanied by discontinuous precipitation in the AZO-5 thin films. Both circular phase decompositions and the crystal orientation occurred. Inappropriate electropulsing might damage zones, which resulted in tremendous decrease in electrical conductivity. Circular changes in both the peak position and the width of the PL wavelength were observed in the EPT AZO-5 thin films. Formation of zones favored reducing the roughness of the thin film.

Key words: Electropulsing, Phase transformation, Electrical conductivity, Photoluminescence, Thin-films, AZO

Y. H. Zhu, C. M. Luk. Electropulsing-Induced Microstructural Changes and Their Effects on Electrical Conductivity of Thin Films of an Al-doped ZnO[J]. Acta Metallurgica Sinica (English Letters), 2018, 31(12): 1361-1367.

Figures/Tables 5

Fig. 1 Electropulsing-induced circular spinodal decomposition and discontinuous decomposition in AZO-5 thin films: SEM images a, XRD diffractograms b, PL intensity vs wavelength c

Fig. 2 Electrical conductivity, electrical resistivity, carrier concentration and mobility of AZO-5 thin films after various periods of electropulsing

Fig. 3 AFM images of AZO-5 thin films after various periods of electropulsing

Fig. 4 Root mean square (RMS) values of AZO-5 thin films after various periods of electropulsing (0, 3, 5, 9, 15 and 20 min)

Fig. 5 PL peak wavelength position vs electropulsing time of AZO-5 thin films, showing the twice blue shifting

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