Acta Metallurgica Sinica (English Letters) ›› 2017, Vol. 30 ›› Issue (12): 1221-1230.DOI: 10.1007/s40195-017-0656-6
Special Issue: 2017-2018薄膜和涂层专辑
• Orginal Article • Previous Articles Next Articles
Qi-Xiang Fan1(), Jiao-Jiao Zhang1, Zheng-Huan Wu1, Yan-Mei Liu1, Tao Zhang2, Bing Yan1, Tie-Gang Wang1(
)
Received:
2017-03-14
Revised:
2017-05-26
Online:
2017-12-20
Published:
2018-02-05
Qi-Xiang Fan, Jiao-Jiao Zhang, Zheng-Huan Wu, Yan-Mei Liu, Tao Zhang, Bing Yan, Tie-Gang Wang. Influence of Al Content on the Microstructure and Properties of the CrAlN Coatings Deposited by Arc Ion Plating[J]. Acta Metallurgica Sinica (English Letters), 2017, 30(12): 1221-1230.
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Parameters | Value |
---|---|
Base pressure (Pa) | 5 × 10-4 |
Working pressure (Pa) | 0.8 |
Bias voltage (V) | - 30 |
Ar flow (sccm) | 100 |
N2 flow (sccm) | 100 |
Deposition temperature (°C) | 300 |
Deposition time (min) | 120 |
Arc current of Al and Cr target (A) | 70:100; 80:90; 100:80; 120:80 |
Rotation speed of the sample (r/min) | 30 |
Distance between the substrate and target (mm) | 120 |
Table 1 The deposition parameters of the CrAlN coatings deposited by arc ion plating
Parameters | Value |
---|---|
Base pressure (Pa) | 5 × 10-4 |
Working pressure (Pa) | 0.8 |
Bias voltage (V) | - 30 |
Ar flow (sccm) | 100 |
N2 flow (sccm) | 100 |
Deposition temperature (°C) | 300 |
Deposition time (min) | 120 |
Arc current of Al and Cr target (A) | 70:100; 80:90; 100:80; 120:80 |
Rotation speed of the sample (r/min) | 30 |
Distance between the substrate and target (mm) | 120 |
I Al (A) | I Cr (A) | I Al/(I Cr + I Al) | Composition (at.%) | C Al/(C Al + C Cr) | Thickness (μm) | |
---|---|---|---|---|---|---|
CrAlN1 | 70 | 100 | 0.4118 | 26.07Al-33.15Cr-40.78N | 0.4402 | 3.12 |
CrAlN2 | 80 | 90 | 0.4706 | 30.77Al-26.92Cr-42.31N | 0.5334 | 3.76 |
CrAlN3 | 100 | 80 | 0.5556 | 39.19Al-23.07Cr-37.75N | 0.6300 | 3.78 |
CrAlN4 | 120 | 80 | 0.6 | 36.87Al-16.14Cr-46.99N | 0.6955 | 4.71 |
Table 2 Deposition current, the target current ratio I Al/(I Cr + I Al), average composition, content ratio C Al/(C Al + C Cr) and thickness of the CrAlN coatings deposited by arc ion plating
I Al (A) | I Cr (A) | I Al/(I Cr + I Al) | Composition (at.%) | C Al/(C Al + C Cr) | Thickness (μm) | |
---|---|---|---|---|---|---|
CrAlN1 | 70 | 100 | 0.4118 | 26.07Al-33.15Cr-40.78N | 0.4402 | 3.12 |
CrAlN2 | 80 | 90 | 0.4706 | 30.77Al-26.92Cr-42.31N | 0.5334 | 3.76 |
CrAlN3 | 100 | 80 | 0.5556 | 39.19Al-23.07Cr-37.75N | 0.6300 | 3.78 |
CrAlN4 | 120 | 80 | 0.6 | 36.87Al-16.14Cr-46.99N | 0.6955 | 4.71 |
Fig. 2 XPS peaks in the Cr 2p spectra of the four CrAlN coatings deposited by arc ion plating under different target currents a CrAlN1#, b CrAlN2#, c CrAlN3#, d CrAlN4#
Fig. 3 XPS peaks in the N 1s spectra of the four CrAlN coatings deposited by arc ion plating under different target currents a CrAlN1#, b CrAlN2#, c CrAlN3#, d CrAlN4#
Fig. 4 Surface morphologies of the four CrAlN coatings deposited by arc ion plating technology under different target currents a CrAlN1#, b CrAlN2#, c CrAlN3#, d CrAlN4#
Fig. 5 Cross-sectional morphologies of the four CrAlN coatings deposited by arc ion plating technology under different target currents a CrAlN1#, b CrAlN2#, c CrAlN3#, d CrAlN4#
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