Spray Pyrolysis Deposition of ZnO Thin Films from Zinc Chloride Precursor Solution at Different Substrate Temperatures

doi:10.1007/s40195-014-0177-5

Abstract

Abstract:

ZnO films were prepared at different substrate temperatures through spraying pyrolysis deposition of zinc chloride precursor onto glass substrate. Substrate temperature affects surface morphology of films and therefore their optical and electrical properties. All films are polycrystalline with Wurtzite crystal structure and preferentially grow along c-axis direction. Formation of ZnO rods start at about 500°C. The diameter and length of rods deposited at 500°C are 350-500 and 550-700nm, respectively. By increasing substrate temperature, film becomes more coverage and diameter of the rods reduces to 250-300nm but their length increases to 1,000-1,200 nm, respectively. Optical transmission in visible region decreases with increasing substrate temperature. An ultraviolet emission and two visible emissions at 2.82 and 2.37eV are observed for photoluminescence spectra at room temperature. The resistivity of ZnO films increases with increasing substrate temperature due to surface morphology.

Key words: ZnO, Rods, Spray pyrolysis, Substrate temperature, Surface morphology

Fahimeh Zahedi, Reza Sabet Dariani, Seyed Mohammad Rozati. Spray Pyrolysis Deposition of ZnO Thin Films from Zinc Chloride Precursor Solution at Different Substrate Temperatures[J]. Acta Metallurgica Sinica (English Letters), 2015, 28(1): 110-114.

Figures/Tables 6

Fig. 1 XRD patterns of ZnO films prepared at different substrate temperatures

Table 1 Structural parameters of ZnO films prepared at different substrate temperatures

Substrate temperature (°C)	Lattice constants (Å)		Diameter of rods (nm)	Length of rods (nm)
Substrate temperature (°C)	a	c	Diameter of rods (nm)	Length of rods (nm)
400	3.253	5.204	-	-
450	3.253	5.202	-	-
500	3.254	5.203	350-500	550-700
550	3.248	5.200	250-350	1,000-1,200

Fig. 2 Top view FESEM of ZnO films prepared at different substrate temperatures: a 400 °C; b 450 °C; c 500 °C; d 550 °C

Fig. 3 Cross-sectional FESEM images of ZnO films prepared at different substrate temperatures: a 500 °C; b 550 °C

Fig. 4 Optical transmission spectra of the ZnO films prepared at different substrate temperatures

Fig. 5 PL spectra for ZnO films prepared at different substrate temperatures with the excitation wavelength of 325 nm

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