Acta Metallurgica Sinica (English Letters) ›› 2021, Vol. 34 ›› Issue (7): 973-985.DOI: 10.1007/s40195-020-01169-y

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Preparation and Photoelectric Properties of Patterned Ag Nanoparticles on FTO/Glass Substrate by Laser Etching and Driving Layer Strategy

Li-Jing Huang1,3,4, Gao-Ming Zhang1,3,4, Yao Zhang1,4, Bao-Jia Li2,3,4(), Nai-Fei Ren1,4, Lei Zhao1,4, Yi-Lun Wang1,4   

  1. 1School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China
    2School of Materials Science and Engineering, Jiangsu University, Zhenjiang 212013, China
    3Institute of Micro-Nano Optoelectronic and Terahertz Technology, Jiangsu University, Zhenjiang 212013, China
    4Jiangsu Provincial Key Laboratory of Center for Photon Manufacturing Science and Technology, Jiangsu University, Zhenjiang 212013, China
  • Received:2020-07-16 Revised:2020-09-05 Accepted:2020-10-09 Online:2021-11-28 Published:2020-11-28
  • Contact: Bao-Jia Li
  • About author:Bao-Jia Li, li_bjia@126.com

Abstract:

An effective method based on laser etching and driving layer strategy was proposed to prepare patterned Ag nanoparticles (Ag NPs) on fluorine-doped tin oxide (FTO)/glass substrate and thus to enhance the photoelectric properties. This method successively included depositing an aluminum-doped zinc oxide (AZO) driving layer, laser etching, depositing an Ag layer, furnace annealing and laser removal. Different AZO and Ag layer thicknesses were adopted, and the surface morphology, crystal structure and photoelectric properties were investigated. An Ag NPs/FTO/glass sample without an AZO driving layer was prepared for comparison. It was found that furnace annealing of the Ag layer combined with the AZO driving layer, rather than that without the AZO driving layer, was more conducive to generating patterned Ag NPs. Using a 20-nm-thick AZO layer and a 150-nm-thick Ag layer led to the formation of uniformly distributed Ag NPs being aligned along the laser-etched grooves to form a pattern. The as-obtained sample had the best comprehensive photoelectric property with an average transmittance of 79.95%, a sheet resistance of 7.11 Ω/sq and the highest figure of merit of 1.50 × 10 -2 Ω -1, confirming the feasibility of the proposed method and providing enlightenment for related researches of transparent conductive oxide-based films.

Key words: Ag nanoparticle, Fluorine-doped tin oxide (FTO), Photoelectric property, Laser etching, Driving layer