NETWORK FRACTAL AND ANNEALING-INDUCED AGGREGATION OF Cu/a-C:H BILAYER FILMS

Abstract

Abstract: The Cu/a-C:H bilayer films,grown far from the equilibrium,have the network fractal struc- ture.Their fractal dimension value D_f=1.83.An in-situ dynamic observation of these films under TEM at slowly heating rate revealed that the initial network fractal structure was dam- aged gradually and broken down completely at 535℃.And as the annealing-induced aggregation developed,the random dispersed aggregates formed gradually,the fractal dimen- sion of the new structure decreased with increasing annealing temperature.Finally,D_f=1.63 at 850℃.Based on the surface and interface diffusion model of the metallic atoms,the varia- tion of the structural character could be explained.

Key words: Cu film, fractal, annealing-induced aggregation

ZHANG Renji Tsinghua University,Beijing,ChinaHe Daren WANG Wangdi Northwestern University,Xi'an,China. NETWORK FRACTAL AND ANNEALING-INDUCED AGGREGATION OF Cu/a-C:H BILAYER FILMS[J]. Acta Metallurgica Sinica (English Letters), 1991, 4(7): 50-54.

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NETWORK FRACTAL AND ANNEALING-INDUCED AGGREGATION OF Cu/a-C:H BILAYER FILMS

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