Abstract: Evaluation of adhesion of PVD Ti and TiN films on steel A_3 was carried out with constant rate pulling test(CRPT)at 0.05 mm/min under simultaneous SEM observation. As a criterion,the critical elongations of the film/substrate system for the initial cracking and spelling of the film may be applied to evaluate the plasticity and adhesion of the film to substrate.The conventional scratch test was also made for evaluation of the adhesion for the same systems.Both methods give the coordinate assessment for all the systems. In addition,the influence of the films on the ultimate yield strength of the substrate was discussed and another criterion of conherent work was proposed for the evaluation.

Key words: PVD film, constant rate pulling test, scratch test, adhesion