Abstract: The TEM observation on the single-side thinned specimens was made of the nucleation and growth of boride during boronization for steel 20 and the influence of prior room temperature deformation.The results of X-ray diffraction and electron probe microstructure analysis show that only Fe_2B formed in the surface layer of specimens at the beginning of boronization;the atomic concentration of B in the surface layer increased with the increase of deformation monotonously;and the segregation of B atoms in the dislocation cells hindered the recovery and recrystallization of the deformed structure of the matrix and accelerated the nucleation and growth of boride in the surface layer.

Key words: boronization, boride, dislocation, nucleation, growth, deformation