Abstract: The full energy distribution of backscattered electrons from the elastic peak down to the true-secondaty electron peak for heavy metals, Ta, W, Pt and Au, in Auger electron spectroscopy in the EN(E) mode has been studied with a Monte Carlo simulation method, which includes cascade-secondary-electron production. The simulation model is based on the use of a dielectric function for describing inelastic scattering and secondary excitation, and on the use of Mott cross sections for elastic scattering. A systematic comparison between the calculated and experimental spectra measured with a cylindrical mirror analyzer has been made for primary energies ranging from 1 to 5keV. Excellent agreement was obtained for these heavy metals on the backscattering background at primary energies in the keV region. A significant contribution of cascade secondary electrons to the measured spectra on the low-energy side was found.

Key words: backscattered electrons, Monte Carlo, AES