1 H .G leiter, Progress in M aterials Science33 (1989)223. 2 R.Birringer,M ater.Sci.Eng.A 117 (1989)33. 3 R.W .Siegel, Annu.Rev.M ater.Sci.21 (1991)559. 4 S.A .Barnett,Physics ofThin Film s,eds.M .H .Fracom beand J.A .V ossen (Chap.1,A cadem ic Press,N .Y .,1993) p.1. 5 R.W .Siegel,J.Phys.Chem .Solids55(10)(1994)1097. 6 R.W .Siegeland G .E.Fougere,M at.Res.Soc.Sym p.Proc.362 (1995)219. 7 H .G leiter,Nanostructured M aterials6 (1996)3. 8 K .Lu, M ater.Sci.Eng.R16 (1996)161. 9 B.X .Liu and O .Jin,Phys.Stat.Sol.A 161 (1997)3. 10 S.Y ip,Nature 391 (1998)532. 11 S.V eprek,P.N esládek,A .N iederhofer,F.G latz,M .Jílek and M .ím a,Surf.Coat.Technol.108-109 (1998)138. 12 J.M usiland J.V lcˇek,M aterials Chem istry and Physics54 (1998)116. 13 S.V eprek,J.Vac.Sci.Technol.A 17 (1999)2401. 14 A .N iederhofer,K .M oto,P.N esládek and S.V eprek,Proc.ofthe 14th InternationalSym posium on Plasm a Chem istry,eds.M .H rabovskˊy,M .K onrád and V .K opeckˊy (V ol.III, Institute ofPlasm aPhysicsA S CR, Prague,Czech Republic,1999)p.1521. 15 J.M usil, Surf.Coat.Technol.125 (2000)322. 16 A .A .V oevodin and J.S.Zabinski,Thin Solid Film s 370 (2000)223. 17 H .G leiter,Acta M ater.48 (2000)1. 18 J.M usiland J.V lcˇek,Surf.Coat.Technol.142-144 (2001)557. 19 H .G leiter,Scripta M ater.44 (2001)1161. 20 S.V eprek and A .S.A rgon,Surf.Coat.Technol.146-147 (2001)175. 21 V .V .Brazhkin,A .G .Lyapin and R.J.H em ley,PhilosophicalM agazineA 82(2)(2002)231. 22 S.V eprek and A .S.A rgon,J.Vac.Sci.Technol.B20(2)(2002)650. 23 J.M usil,J.V lcˇek,F.Regent,F.K unc and H .Zem an,Key Engineering M aterials 230-232 (2002)613. 24 H .G leiterand M .Fichtner,Scipta M aterialia 46 (2002)497. 25 S.Zhang,D .Sun,Y .Fu and H .D u,Surf.Coat.Technol.167 (2003)113. 26 G .M .D em yashev,A .L.Taube and E.Siores,H andbook ofOrganic-Inorganic H ybrid M aterials and Nanocom posites,ed.H .S.N alw a (V ol.I,Chap.I,A m erican Scientifuc Publisher,Stevenson Ranch, CA ,U SA ,2003)p.1. 27 G .M .D em yashev,A .L.Taube and E.Siores,H andbook ofOrganic-Inorganic H ybrid M aterials and Nanocom posites,ed.H .S.N alw a (V ol.X ,A m erican Scientifuc Publisher,Stevenson Ranch,CA ,U SA ,2004)p.1. 28 J.M usil,Nanostructured Thin Film s and Nanodispersion Strengthened Coatings,eds.A .A .V oevodin,E.A . Levashov,D .V .Shtansky and J.J.M oore (N A TO ScienceSeriesV ol.155,K luw erA cadem icPublishersB.V . D ordrecht,The N etherlands,2004)p.43. 29 J.M usil,Nanostructured H ard Coatings, eds.A .Cavaleiro and J.T.M .de H osson (Chap.10, K luw er A cadem ic/Plenum Publishers, N ew Y ork,U SA ,2005)(in Press). 30 S.V eprek,A .N iederhofer,K .M oto,T.Bolom ,H .D .M a nnling,P.N esládek,G .D ollingerand A .Bergm aier, Surf.Coat.Technol.133-134 (2000)152. 31 H .S.K im ,Scripta M aterialia 39(8)(1998)1057. 32 G .W eigang,H .H echtand G .M innigerode,Z.Phys.B96 (1995)349. 33 U .W ahlstro m ,L.H ultm an,J.E.Sundgren,F.A bidi,I.Petrov and J.E.G reene,Thin Solid Film s235 (1993)62. 34 K .Y am am oto,T.Sato and M .Takeda,Surf.Coat.Technol.193(1-3)(2005)167. 35 H .H asegaw a,A .K im ura,T.Suzuki,Surf.Coat.Technol.132 (2000)76. 36 Y .M akino,ISIJ International38(9)(1998)925. 37 J.M usiland H .H rubˊy,Thin Solid Film s365 (2000)104. 38 H .Poláková,J.M usil,J.V lcˇek,J.A llaartand C.M itterer,Thin Solid Film s444 (2003)189. 39 J.M usil,H .Poláková,J.°una and J.V lcˇek,Surf.Coat.Technol.177-178 (2004)289. 40 J.M usil,P.Zem an,H .H rubˊy and P.H .M ayrhofer,Surf.Coat.Technol.120-121 (1999)179. 41 P.Zem an,R.Cˇerstvˊy, P.H .M ayrhofer,C.M iyyrtrt and J.M usil,Science & Enginering A 289 (2000)189. 42 J.M usil,J.V lcˇek,P.Zem an,Y .Setsuhara,S.M iyake,S.K onum a,M .K um agaiand C.M itterer,Jpn.J.Phys. A41(11) (2002)6529. 43 H .S.M yung,H .M .Lee,J.G .H an and L.R.Shaginyan,Surf.Coat.Technol.163-164 (2003)591. 44 Z.G .Li,J.L.H e,T.M atsum oto,T.M ori,S.M iyake and Y .M uram atsu,Surf.Coat.Technol.174-175 (2003) 1140. 45 J.G .H an,H .S.M yung,H .M .Lee and L.R.Shaginyan,Surf.Coat.Technol.174-175 (2003)738. 46 Eric A .Brandesin A ssociation w ith Fulm erResearch Institute Ltd.,Sm ithells M etals Reference Book (Par.8, Sixth edition,Butterw orth H einem ann, London,1992)p.24. 47 N .Jiang,Y .G .Shen,Y .W .M ai,T.Chan and S.C.Tung,M ater.Sci.Eng.B106 (2004)163. 48 M .D iserens,J.Patcheiderand F.Lévy,Surf.Coat.Technol.108-109 (1998)241. 49 J.Patscheider,T.Zehnderand M .D iserens,Surf.Coat.Technol.146-147 (2001)201. 50 J.Patscheider,M RS Bulletin 28(3)(2003)180. 51 M .N aka,T.Shibayanagi,M .M aeda,H .M oriand Y .O gata,Proceedings ofInternationalSym posium on Environm ental-Conscious Innovative M aterials Processing with Advanced Energy Sources,ed.H igh Tem perature Society ofJapan (K yoto,Japan,N ovem ber24-27,1998)p.341. 52 S.V eprek and S.Reiprich,Thin Solid Film s 268 (1995)64. 53 S.V eprek and A .S.A rgon,J.Vac.Sci.Technol.B20(2)(2002)650. 54 Z.G .Li,M .M ori,S.M iyake,M .K um agai,H .Saito and Y .M uram atsu,Surf.Coat.Technol.193(1-3)(2005) 345. 55 F.K auffm ann,G .D ehm ,E.A rtz,V .Schier,S.H enke,A .Schattke and T.Beck,M at.Res.Soc.Sym p.Proc.,eds. R.K .Singh,H .H ofm ann,M .Sena,R.Patch and M .M uham ed (V ol.704,PA ,U SA ,2002)p.W 7.3.1. 56 N .N ose,W .A .Chiou,M .Zhou,T.M ae and M .M eshii, J.Vac.Sci.Technol.A 20(3)(2002)823. 57 M .Zhou,N .N ose,Y .D eguchi,T.M ae and K .N ogi,J.Vac.Sci.Technol.A 21(5)(2003)1791. 58 J.M usil,R.D aniel,P.Zem an and O .Takai, Thin Solid Film s478 (2005)238. 59 H .Zem an,J.M usiland P.Zem an,J.Vac.Sci.Technol.A 22(3)(2004)646. 60 J.B.Choi,K .Cho,Y .K im ,K .H .K im and P.K .Song,Jpn.J.Phys. 42(10)(2003)6556. |