Abstract: A Molecular Dynamics (MD) simulation with Tersoff empirical many-body potentialhas been employed to investigate the growth processes of diamond film with energeticspecies deposition. In the present study, we have studied the reaction probabilities ofenergetic species with energies of 0.1 e V to 10e V at the substrate temperature of 1100K.In the cases of the diamond growth on the surface with H passivation, the reactionprobability of hydrocarbon species considerably increases when the species energy ishigher than 2e V. This means that the diamond film can grow in the case of highincident species energy without the process of hydrogen abstraction, which is neededin the case of incident species with low energy. The reaction mechanism of energeticspecies on hydrogen passivated diamond surface is also discussed.

Key words: molecular dynamics simulation, diamond film growth, reaction probability