Acta Metallurgica Sinica (English Letters) ›› 2003, Vol. 16 ›› Issue (4): 283-288 .

• Research Articles • Previous Articles     Next Articles

PREPARATION AND PROPERTIES OF Ni-Cr AND Fe-Cr-A1 FILMS BY VACUUM EVAPORATION

X.W.Shi, Z.Y.Liu, D.C.Zeng, C.M.Li   

  1. InstituteofMaterialsScience&Technology,CollegeofMechanicalEngineering,SouthChinaUniversityofTechnology,Guangzhou510640,ChinaManuscriptreceived25November2002
  • Received:2002-11-25 Revised:1900-01-01 Online:2003-08-25 Published:2009-10-10
  • Contact: X.W.Shi

Abstract: Ni-Cr and Fe-Cr-Al films deposited on the Al2O3 substrate are studied by a method of vacuum evaporation in this paper. Influence of resistance value on density and evap-oration parameters of the films reveals that the resistance of films and the adhesion of films to substrates are determined by the evaporation time and the substrate temperate under the condition of the maximum vacuity of 6.2×10^-4Pa, resvectively.

Key words: vacuum evaporation, resistance of film, vacuity