Abstract: OMc V ^7 Li^++ RBS was used for investigations of thermal dil~sion of Ag in Cu single crystals. The annealing of samples was carried out in vacuum in the temperature range from 498K to 613K. The clement depth concentration profiles transformed from RBS spectra indicate that the diffusion of Ag into Cu is a typical volume diffusion. The Arrhenius parameters correspondinq to the diffusion were obtained.

Key words: Ag, diffusion, single crystal,