Abstract: The changes in surface topography of thin conducting Ag films under high-density current condition are studied by optical and scanning tunnelling microscopy (STM).It is established that the loss of conductivity in specimens occurs through depletion of the material due to their overheating and electromigration process. It has been shown that the r.m.s, roughness, the fractal dimension of voids and the fractal dimension of the surface allow complete numerical characterization of surface topography changes in thin Ag films.

Key words: STM, thin Ag films, surface roughness,