Abstract: This paper briefly introduces the characteristics of electron beam physical vapor deposition (EBPVD) technique and the whole process of preparing micro-layer composite laminate. And several major influencing factors are presented and discussed. It was found that residual gas pressure should be low enough to guarantee the unobstructed transportation of vapor steam and electron beam; the evaporation method and evaporation speed are up to the di®erent vapor pressure deficit of compositions of raw materials; and the substrate temperature could have great influence on the microstructure of the micro-layer laminates.

Key words: micro-layer composite material, EBPVD, residual gas pressure,