Acta Metallurgica Sinica (English Letters) ›› 2003, Vol. 16 ›› Issue (4): 309-312 .

• Research Articles • Previous Articles     Next Articles

PREPARATION AND CHARACTERIZATION OF POLY-CRYSTALLINE SILICON THIN FILM

Y.F.Hu[1], H.Shen[2], Z.Y.Liu[1], L.S.Wen[1]   

  1. [1]CollegeofMechanicalEngineering,SouthChinaUniversityofTechnology,Guangzhou510640,China [2]GuangzhouInstituteofEnergyConversion,TheChineseAcademyofSciences,Guangzhou510070,ChinaManuscriptreceived25November2002
  • Received:2002-11-25 Revised:1900-01-01 Online:2003-08-25 Published:2009-10-10
  • Contact: Y.F. Hu

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Abstract: Poly-crystalline sihcon thin film has big potential of reducing the cost of solar cells.In this paper the preparation of thin film is introduced, and then the morphology of poly-crystalhne thin film is discussed. On the film we developed poly-crystaUine silicon thin film solar cells with efficiency up to 6.05 165194876thout anti-reflection coating.

Key words: poly-crystalline silicon thin film, RTCVD, SSP,

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