Abstract: A new net-shape cathode sputtering target which has a simple structure and a high sputtering was put forward. The multiple-structure made of alloying and coating layers of tantalum was achieved on the surface of TC4 (Ti6AI4V) using this method in double glow surface alloying process. The tantalized samples were investigated by SEM, XRD and electrochemical corrosion method .Results show the complicated tissue of pure tantalizing layer and diffusion layer was successfully formed on the surface of TC4 with the method of net-shape cathode glow discharge, which further improved the corrosion-resistance of TC4 and formed good corrosion-resistant alloys.

Key words: TC4 (Ti6AI4V), cathode sputtering, tantalizing