Abstract: TEM observation on the ionitriding layer was carried out on steels W18Cr4V,38CrMoAl and 1Cr18Ni9Ti,and AES of elementary analysis was also made on the outer surface of ionitrid- ing layer of austenitic stainless steel.Perhaps due to the ion-bombardment effect,a microcrystalline structure with texture was affirmed along surface of the ionitriding layer.It may be affected by cathodic sputtering and absorption that the atomic ratio of Cr/Fe in- creases and of Ni/Fe decreases on surface of nitriding layer on austenitic stainless steel 1Cr18Ni9Ti,thus the α-phase microcrystalline structure occurrs.

Key words: ionitriding, microcrystal, surface structure