EFFECT OF CARBON CONTENT IN SUBSTRATE ON CVD TiN COATING

Abstract

Abstract: Effect of carbon content of steel substrate,on the chemical vapour deposition(CVD)of TiN has been investigated.The increment of deposition rate is linearly related to the increase of carbon content in own substrate.The α-Fe peak,besides TiN,is revealed in X-ray diffraction pattern of TiN coating.The(220)preferred growth of TiN deposited on steel Cr12MoV substrate increases with the increase of depositing temperature.Only Ti energy spectrum was found from the bright region at coating surface and the interior,while both Ti and Fe energy spectra from dark region.

Key words: TiN chemical vapour deposition, coating

CHEN Erbao East China Institute of Metallurgy,Maanshan,Anhui Associate Professor,Department of Metallurgical Engineering,East China Institute of Metallurgy,Maanshan,Anhui 243002,China. EFFECT OF CARBON CONTENT IN SUBSTRATE ON CVD TiN COATING[J]. Acta Metallurgica Sinica (English Letters), 1992, 5(9): 190-193.

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EFFECT OF CARBON CONTENT IN SUBSTRATE ON CVD TiN COATING

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