EFFECT OF Ti ON MICROSTRUCTURE OF STEEL 321 FILM SYNTHESIZED BY MAGNETRON SPUTTERING DEPOSITION

Abstract

Abstract: Effect of increasing content of Ti on the crystalline-to-amorphous transition in alloy film of stainless steel 321 plus Ti synthesized by high rate magnetron sputtering deposition is reported.X-ray diffraction analysis revealed that the microstructure of film was sequently changed from α-Fe,α-Fe-X-phase,microcrystalline+amorphous into amorphous with increasing content of Ti fiom 0—3,3—10,10—18 and 18—30 wt-% respectively.

Key words: magnetron sputtering, stainless steel film, Ti, microstructure

YANG Dejun ZHOU Honghui LI Huiqin University of Science and Technology Beijing,Beijing,China professor,Department of Corrosion Engineering,University of Science and Technology Beijing,Beijing 100083,China. EFFECT OF Ti ON MICROSTRUCTURE OF STEEL 321 FILM SYNTHESIZED BY MAGNETRON SPUTTERING DEPOSITION[J]. Acta Metallurgica Sinica (English Letters), 1993, 6(11): 383-386.

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EFFECT OF Ti ON MICROSTRUCTURE OF STEEL 321 FILM SYNTHESIZED BY MAGNETRON SPUTTERING DEPOSITION

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