Acta Metallurgica Sinica (English Letters) ›› 1993, Vol. 6 ›› Issue (12): 472-473.

• Research paper • Previous Articles     Next Articles

TEXTURE DETERMINATION OF THIN FILM ZrO_2 BY ELECTRON DIFFRACTION

WANG Yinghua Tsinghua University,Beijing,China Department of Materials Science and Engineering,Tsinghua University,Beijing 100084,China   

  • Received:1993-12-11 Revised:1993-12-11 Online:1993-12-11 Published:2009-10-10

Abstract: A method for semi-quantitative determination of thin film texture using electron diffrac- tion is described.The texture state of a zirconia thin film with a cubic structure has been determined in this way and is presented as an example.

Key words: texture, thin film, electron diffraction, ZrO_2