Abstract: Nucleation and growth of He bubbles at different annealing temperatures T≤1023 K in stain- less steels HR-2 and SS321,implanted with He~+(40-70 keV.1×10~(16)-6× 10~(17) He~+/cm~2),were ohserved under TEM.T=0.45T_m seems to be a transition temperature.The He bubbles continue mainly their nucleation at 0.3T_m< T<0.45T_m,and grow predominantly at T≥0.45T_m,due probably to migration and coalescence by surface diffusion of metal atoms around the bubbles.The apparent activation energies for the growth are found to he 0.41 and 0.31 eV for HR-2 and SS321 respectively.The bubble density in HR-2 is greater than that in SS321 within whole measuring temperature range,and the onset temperature of rapid swelling is also higher.It is believed that the resistance of HR-2 to He is superior to that fo SS321.

Key words: stainless steel, ion implantation, He bubble, steel SS32I, steel HR-2