Abstract: A cross-sectional sample of indentation in [001] silicon was made and a lateral microcrack beneath the indentation was observed by high resolution electron microscope (HREM). The HREM images around the microcrack tip show an alternate distribution of the amorphous and lattice structure. The crack does not propagate by the successive debonding between certain atomic planes, meaning that before a crack completely opens, there may be a stage of amorphization, resulting from severe distortion of lattice.

Key words: amorphization, lateal crack, indentation, HREM, silicon