SYNTHESIZED AND MECHANICAL PROPERTY STUDY OF DOPED  TITANIUM DIOXIDE FILM

Abstract

Abstract: In thispaper,the magnetronsputtering wasadoptedtosynthesize Ta5 + doped Titanium dioxidefilms. Micro hardness and wear resistance of doped Titani um dioxide films was studied. The results showed that the doping element haveimproved the micro hardness and the wearability of TiO2 film ,and that the micro hardness wasalwaysimproved with theincreasingofthe dopingele mentdensity buttheimproved degreeofthe wearresistance wasdecreasingaf terincreasing and possessed an optimum valuein a certain densityfilm .

Key words: doping, film , micro hardness, wearability

J.Y. Chen , Y.XLeng, P.Yang, H. Sun and N. Huang The Departmentof Materials Engineering,SouthwestJiaotong University ,Chengdu 610031 ,China. SYNTHESIZED AND MECHANICAL PROPERTY STUDY OF DOPED TITANIUM DIOXIDE FILM[J]. Acta Metallurgica Sinica (English Letters), 1999, 12(4): 673-677.

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SYNTHESIZED AND MECHANICAL PROPERTY STUDY OF DOPED TITANIUM DIOXIDE FILM

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