STUDY OF THE INJURY OF THE Ar+ INJECTION Si LAYER BY THE USE OF XRD AND ELLIPSOMETER

Acta Metallurgica Sinica (English Letters) ›› 1999, Vol. 12 ›› Issue (5): 1033-1037.

• Research paper • Previous Articles Next Articles

STUDY OF THE INJURY OF THE Ar+ INJECTION Si LAYER BY THE USE OF XRD AND ELLIPSOMETER

G.Q.Wang,F.F.Jiang and X.N.Wang Basic Lessons Department, Shengyang University, Shengyang 110044, China

Received:1999-10-25 Revised:1999-10-25 Online:1999-10-25 Published:2009-10-10

Abstract

G.Q.Wang,F.F.Jiang and X.N.Wang Basic Lessons Department, Shengyang University, Shengyang 110044, China. STUDY OF THE INJURY OF THE Ar+ INJECTION Si LAYER BY THE USE OF XRD AND ELLIPSOMETER[J]. Acta Metallurgica Sinica (English Letters), 1999, 12(5): 1033-1037.

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STUDY OF THE INJURY OF THE Ar+ INJECTION Si LAYER BY THE USE OF XRD AND ELLIPSOMETER

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