Abstract: In view of being difficult to find a non-oriented multilayer specimen, the precise defocusing correction become a particular obstacle of quantitative texture analyszs of the multzlayer. A new method is employed in this paper for comcting the eoperzment data. And a theoretical calculation for the defocus curre is proposed thinking about both thc dtherent film thickness and the penetration depth of the incident beam in the films. A critical value jor the defocusing cormction in the film is alsi cinsidered. This new tcchnique is applied to the Zn-Cu multilayer for which the quantitative texture analysis is completed by the modified maxitnum entropy tnethod.

Key words: multilayer, x-ray diffraction, texture