Abstract: Surface compositions of Fe3Si, FeSi and FeSi2 under 0.1 to 5ke V Ar+ bombaniment have been investigated by using AES method, and the results indicate that the sudece compositions depend strongly on ion enerpy and sample bulk compositions. While in FeSi and FeSi2 only Fe enrichment in the selvage has been observed, in Fe3Si it is Si enriched when the ion enerpy is higher than 31OeV Competition between preferential sputtering and radiation enhanced segmpation is quoted to eoplain this phenomenon.

Key words: preferential sputtering, iron silicides, radiation enhanced segregation