TWO-DIMENSIONAL NUMERICAL ANALYSIS OF PLASMA IMMERSION ION IMPLANTATION OF CYLINDRICAL BORES

Abstract

Abstract: Plasma immersion ion implantation (PIII), unrestricted by sight-light process, is considered a proper method for inner surface strengthening. Two-dimensional simulation oj inner surface PIII process of cylindrical bores were carried out in this paper using cold plasma fluid model, and influence of the bore's dimension on impact energy, retained dose and uniformity of inner surface were investigated.

Key words: plasma immersion ion implantation, plasma sheath, inner surface modification, computer simulation

A. G. Liu,X.F. Wang, L.P. Wang, S. Y. Wang, B. Y. Tang and P.K. Chu 1) Advanced Welding Production Technology National Key Laboratory, HIT, Harbin 150001, China 2) Department of Physics and Material Science, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kang, China. TWO-DIMENSIONAL NUMERICAL ANALYSIS OF PLASMA IMMERSION ION IMPLANTATION OF CYLINDRICAL BORES[J]. Acta Metallurgica Sinica (English Letters), 2000, 13(2): 740-745.

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TWO-DIMENSIONAL NUMERICAL ANALYSIS OF PLASMA IMMERSION ION IMPLANTATION OF CYLINDRICAL BORES

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